论文信息 - Uniform characteristics of Si-wire waveguide devices fabricated on 300 mm SOI wafers by using ArF immersion lithography - 字舞流文

Uniform characteristics of Si-wire waveguide devices fabricated on 300 mm SOI wafers by using ArF immersion lithography

T. Horikawa | T. Kita | H. Yamada | M. Toyama | M. Ohtsuka | N. Yokoyama | M. Seki | K. Koshino | Y. Tanushi | A. Sugiyama | E. Ishitsuka | T. Sano