Experimental Analysis of Laser Interferometry-Based Robust Motion Tracking Control of a Flexure-Based Mechanism

This paper presents experimental analysis of laser interferometry-based closed-loop robust motion tracking control for flexure-based four-bar micro/nano manipulator. To enhance the accuracy of micro/nano manipulation, laser interferometry realized robust motion tracking control is established with the experimental facility. This paper contains brief discussions about the error sources associated with the laser interferometry-based sensing and measurement technique, along with detailed error analysis and estimation. Comparative error analysis of capacitive position sensor-based system and laser interferometry-based system is also presented. Robust control demonstrates high precision and accurate motion tracking of the four-bar flexure-based mechanism. The experimental results demonstrate precise motion tracking, where resultant closed-loop position tracking error is of the order of <formula formulatype="inline"><tex Notation="TeX">$\pm$</tex> </formula>20 nm, and a steady-state error of about <formula formulatype="inline"> <tex Notation="TeX">$\pm$</tex></formula>10 nm. With the experimental study and error analysis, we offer evidence that the laser interferometry-based closed-loop robust motion tracking control can minimize positioning and tracking errors during dynamic motion.

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