论文信息 - Vibrational Analysis of Evaporated Si and SiO Film by Inelastic Electron Tunneling Spectroscopy

Vibrational Analysis of Evaporated Si and SiO Film by Inelastic Electron Tunneling Spectroscopy

Inelastic electron tunneling spectroscopy has been used for obtaining the vibrational spectra of the thin films of evaporated Si and SiO. The analysis of the tunneling spectra shows the formation of SiH species. These hydrides are formed from the reaction with residual water molecules in the vacuum system during the evaporation.

M. Higo | H. Hayashi | S. Kamata | Kouichi Nishino | Morihide Higo

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