Cluster Tools Model and Markov Chain Analysis Based on Stochastic Petri Nets

In order to analyze the performance of cluster tools,stochastic Petri nets approach is used to model the serial production process of cluster tools.With "top down" methods,the basic models of tool’s modules are developed firstly.Then,according to the actual production process,all the basic models are combined to construct a stochastic Petri nets model of the production system.Markov chain analysis process based on the model is provided.Furthermore,the system throughput and the usage rate of every production chambers are deduced.The result shows that the model not only represents the concurrent activity of cluster tools,but also describes the stochastic occurrence times of all activities.This method can effectively describe and analyze the production process of cluster tools.