PNEUMATIC SERVO BEARING ACTUATOR FOR ULTRAPRECISE POSITIONING – PART 1 : PRINCIPLE AND BASIC PERFORMANCE

Tomoko Hirayama, Takakazu Kitagawa, Masato Kadotani, Hiroki Danjyo, Takashi Matsuoka1, Katsumi Sasaki2 and Hiroshi Yabe3 Department of Mechanical Engineering, Doshisha University 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto, Japan Pneumatic Servo Controls Ltd. 2266-22 Anagahora, Shimo-Shidami, Moriyama-ku, Nagoya, Aichi, Japan Department of Mechanical Engineering, Kyoto University (former affiliation) Yoshida-honmachi, Sakyo-ku, Kyoto, Japan