The multi-segment adaptive control of the high temperature heat source in a MOCVD vacuum reactor

This research focuses on the adaptive control for a high temperature heat source. The significant characteristic of adaptive control is self-regulation. The adaptive control is very important in a MOCVD process since different parameter values to control temperature in each temperature step are required. Simulations and experiments are performed to verify the feasibility of the proposed control scheme for the MOCVD process. The simulation results are compared with those of the experiment. The results show that the steady-state error in proportional-integral (PI) control is about 3°C, and in adaptive control is 0.3°C. It can be found that the performance of the adaptive control is much better than that of the traditional PI control which is commonly used in industry.