Comparative study of novel micromachined accelerometers employing MIDOS
暂无分享,去创建一个
[1] William C. Tang,et al. Viscous air damping in laterally driven microresonators , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.
[2] J. J. Blech. On Isothermal Squeeze Films , 1983 .
[3] Dan Haronian. In-plane degree of freedom optical waveguide displacement sensors based on geometrical modulation , 1998 .
[4] Otto Leistiko,et al. Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide , 1996 .
[5] Paul Muralt,et al. Design of novel thin-film piezoelectric accelerometer , 1996 .
[6] Farrokh Ayazi,et al. Micromachined inertial sensors , 1998, Proc. IEEE.
[7] Makoto Ishida,et al. Stress-sensitive differential amplifiers using piezoresistive effects of MOSFETs and their application to three-axial accelerometers , 1998 .
[8] Ruey-Shing Huang,et al. A wide-range linear optical accelerometer , 1995 .
[9] Eran Socher,et al. Design and noise consideration of an accelerometer employing modulated integrative differential optical sensing , 2000 .
[10] R. Puers,et al. Electrostatic forces and their effects on capacitive mechanical sensors , 1996 .
[11] Pasqualina M. Sarro,et al. Silicon accelerometer based on thermopiles , 1995 .
[12] Wolfgang Kuehnel,et al. Modelling of the mechanical behaviour of a differential capacitor acceleration sensor , 1995 .
[13] D. Haronian. Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides , 1998 .
[14] F. P. Stratton,et al. A new miniaturized surface micromachined tunneling accelerometer , 1996, IEEE Electron Device Letters.
[15] Byung Man Kwak,et al. A skew-symmetric cantilever accelerometer for automotive airbag applications , 1995 .