On stress evolution and interaction during electromigration in near bamboo structure lines
暂无分享,去创建一个
[1] I. Blech. Electromigration in thin aluminum films on titanium nitride , 1976 .
[2] Carl V. Thompson,et al. Coupled Stress Evolution in Polygranular Clusters and Bamboo Segments in Near-Bamboo Interconnects , 1995 .
[3] M. Korhonen,et al. Stress evolution due to electromigration in confined metal lines , 1993 .
[4] J. J. Clement,et al. Modeling electromigration‐induced stress evolution in confined metal lines , 1995 .
[5] Kim Y. Lee,et al. Electromigration and stress-induced voiding in fine Al and Al-alloy thin-film lines , 1995, IBM J. Res. Dev..
[6] C-K. Hu,et al. Electromigration failure mechanisms in bamboo-grained Al(Cu) interconnections , 1995 .
[7] C. Thompson,et al. Analytic model for the grain structures of near‐bamboo interconnects , 1994 .
[8] M. Korhonen,et al. CLUSTER INTERACTIONS AND STRESS EVOLUTION DURING ELECTROMIGRATION IN CONFINED METAL INTERCONNECTS , 1995 .