A highly sensitive gas-sensing platform based on a metal-oxide nanowire forest grown on a suspended carbon nanowire fabricated at a wafer level

Abstract This paper presents a highly sensitive gas-sensing platform based on a ZnO nanowire (NW) forest circumferentially grown on a suspended single glassy carbon NW. The fabrication was carried out at a wafer level using only batch fabrication processes including carbon-microelectromechanical systems and the hydrothermal method. The suspended architecture and relatively high elastic modulus of the carbon nanowires facilitates selective functionalization on the suspended NW. The circumferentially distributed NW arrangement enhances the accessibility of gas molecule to the ZnO-NW sensing sites, thus facilitating highly sensitive gas sensing. The suspended architecture also enhances efficient mass transfer from the bulk. This novel suspended three-dimensional (3D) NW-based sensor configuration allows better NO2 gas sensing capabilities in terms of the limit of detection (9.45 ppb, S/N = 3), sensitivity (0.393 ppb−1), and linear sensing range (50–300 ppb) compared to the same type of ZnO-NW-based gas sensor fabricated in contact with the substrate.

[1]  R. Lacerda,et al.  Integrated zinc oxide nanowires/carbon microfiber gas sensors , 2010 .

[2]  Ahsanulhaq Qurashi,et al.  Ultra-fast Microwave Synthesis of ZnO Nanowires and their Dynamic Response Toward Hydrogen Gas , 2009, Nanoscale research letters.

[3]  Shyamal Patel,et al.  A review of wearable sensors and systems with application in rehabilitation , 2012, Journal of NeuroEngineering and Rehabilitation.

[4]  Norio Miura,et al.  Application of semiconductor gas sensor to quality control of meat freshness in food industry , 1995 .

[5]  N. Tiwale,et al.  Zinc oxide nanowire gas sensors: Fabrication, functionalisation and devices , 2015 .

[6]  R. Cataneo,et al.  Volatile organic compounds in breath as markers of lung cancer: a cross-sectional study , 1999, The Lancet.

[7]  Russell Binions,et al.  Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring , 2010, Sensors.

[8]  Yeongjin Lim,et al.  Monolithic carbon structures including suspended single nanowires and nanomeshes as a sensor platform , 2013, Nanoscale Research Letters.

[9]  Ahmad Umar,et al.  Growth of aligned ZnO nanorods and nanopencils on ZnO/Si in aqueous solution: growth mechanism and structural and optical properties , 2007 .

[10]  Yeongjin Lim,et al.  Fabrication and application of a stacked carbon electrode set including a suspended mesh made of nanowires and a substrate-bound planar electrode toward for an electrochemical/biosensor platform , 2014 .

[11]  S. R. Silva,et al.  From 1D and 2D ZnO nanostructures to 3D hierarchical structures with enhanced gas sensing properties. , 2014, Nanoscale.

[12]  Anton Amann,et al.  Breath analysis by nanostructured metal oxides as chemo-resistive gas sensors , 2015 .

[13]  I. Tittonen,et al.  Focused ion beam lithography for fabrication of suspended nanostructures on highly corrugated surfaces , 2014, Nanotechnology.

[14]  Z. Öztürk,et al.  Fabrication of ZnO nanowires and nanorods , 2012 .

[15]  Y. E. Kalay,et al.  Hydrothermal zinc oxide nanowire growth using zinc acetate dihydrate salt , 2012 .

[16]  G. Müller,et al.  Solid-State Gas Sensors: Sensor System Challenges in the Civil Security Domain , 2016, Materials.

[17]  Inkyu Park,et al.  A self-heated silicon nanowire array: selective surface modification with catalytic nanoparticles by nanoscale Joule heating and its gas sensing applications. , 2013, Nanoscale.

[18]  M. Scuderi,et al.  Double Role of HMTA in ZnO Nanorods Grown by Chemical Bath Deposition , 2014 .

[19]  J. Furness.  Types of neurons in the enteric nervous system. , 2000, Journal of the autonomic nervous system.

[20]  Kosuke Tsukada,et al.  A Carbon Monoxide Sensing Film Based on Hemoglobin Allostery , 2014 .

[21]  Thomas Klotzbuecher,et al.  Miniaturization of a biomedical gas sensor. , 2004, Physiological measurement.

[22]  Sofian M. Kanan,et al.  Semiconducting Metal Oxide Based Sensors for Selective Gas Pollutant Detection , 2009, Sensors.

[23]  Zhong Lin Wang,et al.  Gigantic enhancement in sensitivity using Schottky contacted nanowire nanosensor. , 2009, Journal of the American Chemical Society.

[24]  Eloise H. Evans,et al.  Standard X-Ray Diffraction Powder Patterns from The JCPDS Research Associateship , 1986, Powder Diffraction.

[25]  Seung-Ho Jung,et al.  High-performance NO2 gas sensor based on ZnO nanorod grown by ultrasonic irradiation , 2009 .

[26]  Nguyen Van Hieu,et al.  On-chip growth of semiconductor metal oxide nanowires for gas sensors: A review , 2017 .

[27]  J T L Thong,et al.  Improving the NH3 gas sensitivity of ZnO nanowire sensors by reducing the carrier concentration , 2008, Nanotechnology.

[28]  R. Kumar,et al.  Zinc Oxide Nanostructures for NO2 Gas–Sensor Applications: A Review , 2014, Nano-Micro Letters.

[29]  V. Consonni,et al.  Effects of Hexamethylenetetramine on the Nucleation and Radial Growth of ZnO Nanowires by Chemical Bath Deposition , 2016 .

[30]  Hengwei Lin,et al.  Preoxidation for colorimetric sensor array detection of VOCs. , 2011, Journal of the American Chemical Society.

[31]  Marc Madou,et al.  A new approach to gas sensing with nanotechnology , 2012, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[32]  Chueh-Yang Liu,et al.  Fabrication and CO Sensing Properties of Mesostructured ZnO Gas Sensors , 2009 .

[33]  C. Grigoropoulos,et al.  Nanowire-on-Nanowire: All-Nanowire Electronics by On-Demand Selective Integration of Hierarchical Heterogeneous Nanowires. , 2017, ACS nano.

[34]  A. Ballman,et al.  HYDROTHERMAL SYNTHESIS OF ZINC OXIDE AND ZINC SULFIDE1 , 1960 .

[35]  Matteo Ferroni,et al.  Single crystal ZnO nanowires as optical and conductometric chemical sensor , 2007 .

[36]  T. Becker,et al.  Air pollution monitoring using tin-oxide-based microreactor systems , 2000 .

[37]  Manfred Madel,et al.  H2S sensing in the ppb regime with zinc oxide nanowires , 2017 .

[38]  Qian Wang,et al.  Application of flower-like ZnO nanorods Gas sensor detecting SF 6 decomposition products , 2013 .

[39]  Cell K. Y. Wong,et al.  Nanowire-based gas sensors , 2013 .

[40]  Rainer Adelung,et al.  Single and Networked ZnO-CNT Hybrid Tetrapods for Selective Room-Temperature High-Performance Ammonia Sensors. , 2017, ACS applied materials & interfaces.

[41]  David C. Dyer,et al.  A gas sensor system for harsh environment applications , 2015 .

[42]  Reginald M Penner,et al.  Chemical sensing with nanowires. , 2012, Annual review of analytical chemistry.

[43]  W. Benecke,et al.  Direct Growth of Freestanding ZnO Tetrapod Networks for Multifunctional Applications in Photocatalysis, UV Photodetection, and Gas Sensing. , 2015, ACS applied materials & interfaces.

[44]  Jongbaeg Kim,et al.  Highly sensitive hydrogen sensor based on suspended, functionalized single tungsten nanowire bridge , 2009 .