This paper reports on a new actuator combining both a piezoelectric actuator and pneumatic cylinder for the automatic assembly application. The results of fundamental experiments are presented and an analytical model is described. The experimental results show that the proposed actuator can move a target object with step sizes in the 10-nm order by utilizing the impact force of a piezoelectric element while maintaining the comparatively long operation range of a pneumatic cylinder. Furthermore, a 3-DOF positioning system had been constructed as a practical application. Due to the limited sensing range of the gap sensors, the positioning range is limited to /spl plusmn/1 mm, /spl plusmn/1 mm, and /spl plusmn/2 mrad along the 3-DOF. A heuristic control model is described. Using this model, a target object made of stainless steel (130/spl times/100/spl times/10 mm) was successfully positioned with an accuracy of /spl plusmn/0.5 /spl mu/m, /spl plusmn/0.5 /spl mu/m, and /spl plusmn/20 /spl mu/rad along the 3-DOF. It is shown that the combined piezo-pneumatic actuator has attractive practical applications in the field of precision industry.
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