论文信息 - Ion-assisted pulsed laser deposition of cubic BN films on Si (001) substrates

Ion-assisted pulsed laser deposition of cubic BN films on Si (001) substrates

We report on oriented and adherent cubic BN films grown on (001) faces of silicon using the method of ion-assisted pulsed laser deposition. The structure of the films is cubic zinc-blende with a lattice constant of 3.62 Å, as determined by infrared absorption and transmission electron microscopy. The films were found to be polycrystalline, and oriented with the cubic BN [110] axis parallel to the Si [001] direction.

C. Taylor | L. Salamanca-Riba | R. Clarke | A. Ballal | G. Doll

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