论文信息 - Laser modifications of Si(100) : Cl surfaces induced by surface melting : etching and cleaning - 字舞流文

Laser modifications of Si(100) : Cl surfaces induced by surface melting : etching and cleaning

B. Bourguignon | B. Dragnea | J. Boulmer | D. Débarre | J. Budin | Serge Carrez | M. Stoica | A. Aliouchouche