Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage

Application of electrostatic actuators to MEMS is expected. It is important to evaluate nonlinear properties caused by electrostatic forces which are dominant in MEMS. In this research a beam-type electrostatic actuator is modeled by a spring-mass system. Its dynamical characteristics were analytically and numerically investigated in terms of nonlinearity, bifurcation and stability. It was found that nonlinear resonance appears under DC and AC applied voltage, and it may be due to the forced vibration and also parametric resonance.