Significant advances in the technical capabilities of microlens actuators for optical pickups have been achieved using MEMS technology, enabling miniaturization and integration of optical data storage systems. In this work, a new type of compact silicon-on-glass (SOG) actuator for two-dimensional (2-D) positioning of a dispensed polymer microlens is developed by MEMS technology. A wafer-level process for fabrication of the SOG actuator is achieved using anodic bonding of a pyrex wafer and an ultra-thin silicon wafer. Dispensed polymer microlenses are subsequently integrated onto the 2-D actuator. Typical displacements of about ±28.6μm in tracking direction and 3.2μm in focusing direction are experimentally characterized. The compact 2-D SOG actuator can simplify the assembly and expand the application area for the optical pickup system.
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