论文信息 - Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

A novel design of piezoelectric aluminum nitride (AlN)-Si composite cantilever gyroscope is proposed in this paper. The cantilever is stimulated to oscillate in plane by two inverse voltages which are applied on the two paralleled drive electrodes, respectively. The whole working principles are deduced, which based on the piezoelectric equation and elastic vibration equation. In this work, a cantilever gyroscope has been simulated and optimized by COMSOL Multiphysics 5.2a. The drive mode frequency is 87.422 kHz, and the sense mode frequency is 87.414 kHz. The theoretical sensitivity of this gyroscope is 0.145 pm/◦/s. This gyroscope has a small size and simple structure. It will be a better choice for the consumer electronics.

[1] A. Pisano,et al. Experimentally validated aluminum nitride based pressure, temperature and 3-axis acceleration sensors integrated on a single chip , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[2] F. Ayazi,et al. Eigenmode operation as a quadrature error cancellation technique for piezoelectric resonant gyroscopes , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[3] Albert P. Pisano,et al. Novel thin-film piezoelectric aluminum nitride rate gyroscope , 2012, 2012 IEEE International Ultrasonics Symposium.

[4] Farrokh Ayazi,et al. A dynamically mode-matched piezoelectrically transduced high-frequency flexural disk gyroscope , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

[5] P. Muralt,et al. Thickness dependence of the properties of highly c-axis textured AlN thin films , 2004 .

[6] Naser El-Sheimy,et al. Activity Recognition Using Fusion of Low-Cost Sensors on a Smartphone for Mobile Navigation Application , 2015, Micromachines.

[7] MEMS Aluminum Nitride Technology for Inertial Sensors , 2011 .

[8] Ulrich Schmid,et al. Simulation and laser vibrometry characterization of piezoelectric AlN thin films , 2008 .

[9] Farrokh Ayazi,et al. High-Frequency AlN-on-Silicon Resonant Square Gyroscopes , 2013, Journal of Microelectromechanical Systems.