Purpose
This paper aims to develop a resonant accelerometer for structure optimization. The dynamic analysis of the resonator for resonant accelerometer are investigated.
Design/methodology/approach
First, the working principle and mechanical model of the resonator are introduced. Moreover, dynamic analysis of the resonator is used for the purpose of investigating the dynamic characteristics of the resonant accelerometer. Finally, to verify the feasibility of the proposed dynamic analysis method, resonant accelerometer 1g static tumbling experiments of resonant accelerometer are built.
Findings
It can be seen from the natural frequency and the resonator mode that only when the resonator root stiffness is much greater than the resonant beam stiffness, there will be appear corresponding interference mode, therefore,the resonator root stiffness is avoid too large in design. The stability analysis result of resonant beam under axial force show that the resonant beam parameters should be maintained a constant. At the same time, it is concluded from the vibration mode analysis for resonant beam that the influence of the beam thickness and beam errors on the first and second order modes is great. On the other hand, it is concluded from the test result that the designed resonant accelerometer sensitivity is 98 Hz/g, which shows that the dynamic analysis method is feasible.
Practical implications
The research may be significant in the field of resonant sensors, supporting a variety of practical applications such as phone and game.
Originality/value
This paper seeks to establish a foundation for designing and optimizing resonant accelerometer structure. To this end, the dynamic analytical method of the resonator for resonant accelerometer was discussed. The results of this research have proved that the dynamic analysis based on a resonator is an effective approach and instructional in practical resonant sensor design.
[1]
Hong Ding,et al.
A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism
,
2017
.
[2]
Heng Liu,et al.
A resonant accelerometer based on electrostatic stiffness and its closed‐loop control method
,
2011
.
[3]
Liu Heng,et al.
Self‐oscillation loop design and measurement for an MEMS resonant accelerometer
,
2012
.
[4]
Yan Su,et al.
Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
,
2015,
Sensors.
[5]
Ran Shi,et al.
Phase noise analysis of micromechanical silicon resonant accelerometer
,
2013
.
[6]
Bo Li,et al.
A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift
,
2017,
Sensors.
[7]
C. Comi,et al.
Sensitivity and temperature behavior of a novel z-axis differential resonant micro accelerometer
,
2016
.
[8]
Jong Up Jeon,et al.
A micromachined differential resonant accelerometer based on robust structural design
,
2014
.
[9]
Lei Zhao,et al.
Design and simulations of a new biaxial silicon resonant micro-accelerometer
,
2016
.