论文信息 - Development of silicon microheaters for chemoresistive gas sensors

Development of silicon microheaters for chemoresistive gas sensors

We report on the design, fabrication, and characterization of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.

[1] Pierre Temple-Boyer,et al. Realization and performance of thin SiO2/SiNx membrane for microheater applications , 1998 .

[2] Carles Cané,et al. Thermal and mechanical aspects for designing micromachined low-power gas sensors , 1997 .

[3] Julian W. Gardner,et al. Thermal modelling and characterisation of micropower chemoresistive silicon sensors , 1997 .

[4] Wan-Young Chung,et al. Low-power micro gas sensor , 1996 .

[5] Carole Rossi,et al. Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes , 1997 .