Modeling of piezo actuator’s nonlinear and frequency dependent dynamics

Abstract To facilitate on-line identification and implementation of a piezoelectric actuator model for precision machining, this paper describes a hybrid hysteresis model integrating the classical Preisach model and a neural network. The incorporation of a neural network enables on-line model identification from operating data of a piezo (a great contrast to the tedious calibration process required by the classical Preisach model). The model is then extended to describe a piezo actuator’s frequency dependent behavior which is not possible for the classical model. Experimental results confirmed the accuracy of both models and the superiority of the extended one.