论文信息 - Highly reliable, complementary atom switch (CAS) with low programming voltage embedded in Cu BEOL for Nonvolatile Programmable Logic

Highly reliable, complementary atom switch (CAS) with low programming voltage embedded in Cu BEOL for Nonvolatile Programmable Logic

A novel complementary atom switch (CAS) embedded in Cu BEOL has been developed to realize low programming voltage of 2V and extremely high disturbance reliability of OFF-state (T0.1>10 years at 1V, 125°C). The decrement of solid-electrolyte density successfully reduces the programming voltage down to 2V. Two bipolar resistive-change elements such as atom switches are connected in series with opposite direction, in which the two OFF-state elements complementarily divide the voltage stress, greatly enlarging the OFF-state lifetime. The highly reliable, complementary atom switch is a promising device for energy efficient, Nonvolatile Programmable Logic (NPL).

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