Core-shell diode array for high performance particle detectors and imaging sensors: status of the development

We propose a novel high performance radiation detector and imaging sensor by a ground-breaking core-shell diode array design. This novel core-shell diode array are expected to have superior performance respect to ultrahigh radiation hardness, high sensitivity, low power consumption, fast signal response and high spatial resolution simultaneously. These properties are highly desired in fundamental research such as high energy physics (HEP) at CERN, astronomy and future x-ray based protein crystallography at x-ray free electron laser (XFEL) etc.. This kind of detectors will provide solutions for these fundamental research fields currently limited by instrumentations. In this work, we report our progress on the development of core-shell diode array for the applications as high performance imaging sensors and particle detectors. We mainly present our results in the preparation of high aspect ratio regular silicon rods by metal assisted wet chemical etching technique. Nearly 200 μm deep and 2 μm width channels with high aspect ratio have been etched into silicon. This result will open many applications not only for the core-shell diode array, but also for a high density integration of 3D microelectronics devices.

[1]  G. Jia,et al.  Ordered silicon nanowire arrays prepared by an improved nanospheres self-assembly in combination with Ag-assisted wet chemical etching , 2016 .

[2]  G. Jia,et al.  Core–shell diodes for particle detectors , 2016 .

[3]  D. Khang,et al.  Bulk micromachining of Si by metal-assisted chemical etching. , 2014, Small.

[4]  S. Grinstein,et al.  Beam Test Studies of 3D Pixel Sensors Irradiated Non-Uniformly for the ATLAS Forward Physics Detector , 2013, 1302.5292.

[5]  Jan Dellith,et al.  Multiple Core–Shell Silicon Nanowire-Based Heterojunction Solar Cells , 2013 .

[6]  Maurizio Boscardin,et al.  3D silicon sensors: Design, large area production and quality assurance for the ATLAS IBL pixel detector upgrade , 2012 .

[7]  John A Rogers,et al.  Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires , 2012, Nanotechnology.

[8]  Martin Steglich,et al.  Core–shell heterojunction solar cells on silicon nanowire arrays , 2012 .

[9]  R. Bates,et al.  X-ray detection with 3D Medipix2 devices , 2009 .

[10]  R. Bates,et al.  Charge sharing in double-sided 3D Medipix2 detectors , 2009 .

[11]  Ning-Bew Wong,et al.  Ordered silicon nanowire arrays via nanosphere lithography and metal-induced etching , 2007 .

[12]  Zhipeng Huang,et al.  Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density , 2007 .

[13]  Yunjie Yan,et al.  Synthesis of Large‐Area Silicon Nanowire Arrays via Self‐Assembling Nanoelectrochemistry , 2002 .

[14]  K. Mathieson,et al.  Charge sharing in silicon pixel detectors , 2002 .

[15]  H. Nilsson,et al.  Simulation of photon and charge transport in X-ray imaging semiconductor sensors , 2002 .

[16]  Eckhart Fretwurst,et al.  Radiation hardness of silicon detectors — a challenge from high-energy physics , 1999 .

[17]  C. Kenney,et al.  3D — A proposed new architecture for solid-state radiation detectors , 1997 .

[18]  S. Parker,et al.  3D-A new architecture for solid-state radiation detectors , 1997 .