论文信息 - Synthesis of Few-Layer Graphene-on-Insulator Films by Controllable C4F8 Plasma Etching SiC - 字舞流文

Synthesis of Few-Layer Graphene-on-Insulator Films by Controllable C4F8 Plasma Etching SiC

Xuemei Wu | L. Zhuge | Zhaofeng Wu | Yan Yang | C. Jin | Mingzhi Wu | C. Ye | Yijun Xu | T. Huang