Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layers

Love wave surface acoustic wave devices are very promising as sensors in gaseous and liquid environments because of their high sensitivity. In this work, two methods of producing the Love wave guiding layer were utilized to fabricate devices based on ST-cut quartz. The methods involved sputter deposition of silicon dioxide films and spin coating of polymethylmethacrylate (PMMA) films. -cut quartz devices with thicknesses up to and PMMA/ST-cut quartz devices with PMMA thicknesses up to have been manufactured and compared. Mass sensitivity, insertion loss, temperature coefficient of oscillation frequency and frequency noise have been studied as a function of layer thickness. A number of hybrid devices consisting of PMMA film/ film/ST-cut quartz have also been assembled and evaluated. These devices exhibit higher sensitivity than the devices and the PMMA devices produced here.

[1]  Richard M. White,et al.  Fluid loading of a Lamb‐wave sensor , 1988 .

[2]  Yoshio Okahata,et al.  Detection of Odorous Substances by Using a Lipid-Coated Quartz-Crystal Microbalance in the Gas Phase , 1990 .

[3]  A. Venema,et al.  Love waves for (bio)-chemical sensing in liquids , 1992, IEEE 1992 Ultrasonics Symposium Proceedings.

[4]  Adrian C. Stevenson,et al.  A Love plate biosensor utilising a polymer layer , 1992 .

[5]  C. Lowe,et al.  A novel Love-plate acoustic sensor utilizing polymer overlayers , 1992, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  Richard M. White,et al.  Flexural plate-wave gravimetric chemical sensor , 1990 .

[7]  Günter Kovacs,et al.  Theoretical comparison of sensitivities of acoustic shear wave modes for (bio)chemical sensing in liquids , 1992 .

[8]  J. Vetelino,et al.  Improved acoustic-plate-mode biosensor , 1993 .

[9]  Shekhar Bhansali,et al.  Surface acoustic wave hydrogen sensor , 1982 .

[10]  Michael J. Vellekoop,et al.  A love wave sensor for (bio)chemical sensing in liquids , 1994 .

[11]  C. K. Jen,et al.  Sensitivity analysis for Love mode acoustic gravimetric sensors , 1994 .

[12]  G. L. Harding,et al.  Love wave acoustic immunosensor operating in liquid , 1997 .

[13]  B. A. Auld,et al.  Surface Transverse Wave Propagation Under Metal Strip Gratings , 1986, IEEE 1986 Ultrasonics Symposium.

[14]  G. L. Harding,et al.  A study of Love-wave acoustic sensors , 1996 .

[15]  Richard L. Baer,et al.  Atrazine measurements using surface transverse wave devices , 1995 .

[16]  E. Chilla,et al.  Comparison of the mass sensitivity of love and rayleigh waves in a three-layer system , 1994 .

[17]  Y. Okahata,et al.  Piezoelectric crystal for the detection of immunoreactions in buffer solutions , 1994 .

[18]  Geoffrey L. Harding,et al.  An experimental study of Love-wave acoustic sensors operating in liquids , 1997 .

[19]  A. Hierlemann,et al.  Comparison Of Mass-sensitive Devices For Gas Sensing: Bulk Acoustic Wave (baw)- And Surface Acoustic Wave (saw) Transducers , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[20]  H. Wohltjen,et al.  Trace Chemical Vapor Detection Using SAW Delay Line Oscillators , 1987, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[21]  Arnaldo D'Amico,et al.  Hydrogen Sensor Using a Palladium Coated Surface Acoustic Wave Delay-Line , 1982 .

[22]  C. Lowe,et al.  Acoustic Love plate sensors: a theoretical model for the optimization of the surface mass sensitivity , 1993 .

[23]  Antonio J. Ricco,et al.  Characterization of SH acoustic plate mode liquid sensors , 1989 .