论文信息 - Mechanical stress in micromachined components caused by humidity-induced in-plane expansion of thin polymer films - 字舞流文

Mechanical stress in micromachined components caused by humidity-induced in-plane expansion of thin polymer films

G. Gerlach | R. Buchhold | A. Nakladal | K. Sahre | K. Eichhorn

[1] T. Russell,et al. Swelling behavior of an aromatic polyimide , 1989 .

[2] D. V. Krevelen. Properties of Polymers , 1990 .

[3] W. Vieth,et al. Diffusion in and through polymers , 1991 .

[4] H. Kita,et al. Sorption and diffusion of water vapor in polyimide films , 1992 .

[5] Recent advances in photosensitive polyimides , 1993 .

[6] K. L. Mittal,et al. Polyimides: Fundamentals and Applications , 1996 .