论文信息 - Electrical and Structural Properties of Al and B Implanted 4H-SiC - 字舞流文

Electrical and Structural Properties of Al and B Implanted 4H-SiC

Yasunori Tanaka | H. Okumura | H. Tanoue | S. Yoshida | T. Ohdaira | R. Suzuki | M. Hasegawa | M. Ogura | N. Kobayashi