A Novel Design of Three-Aspherical-Mirror Imaging Optics for Extreme Ultra-Violet Lithography
暂无分享,去创建一个
Masahito Niibe | Hiroo Kinoshita | Kiyoto Mashima | Takeo Watanabe | Takeo Watanabe | K. Mashima | Masahito Niibe Masahito Niibe | Hiroo Kinoshita Hiroo Kinoshita
[1] H Kinoshita,et al. Large-area, high-resolution pattern replication by the use of a two-aspherical-mirror system. , 1993, Applied optics.
[2] Kazuhiko Ito,et al. JSPE proceedings of the Second U.S.-Japan Workshop on Soft X-Ray Optics: Technical Challenges : Hotel Mt. Fuji, Yamanaka-ko, Yamanashi-ken, Japan, November 12 - 14, 1996 , 1997 .