Beam steering system using a 2D MEMS scanner

Fiber optical modules manufacturing have been recognized as a key challenge in meeting the anticipated demand for high bandwidth telecommunication equipment. Among all challenges, submicron optical alignment for single mode fiber remains the predominant difficulty [1]. To reduce the alignment effort during the assembly, a XY micro stage has been developed. It consists of a scanning platform with a mounted micro-lens on top (Figure 1). After a passive alignment of the components and the sealing of the package, a fine tuning of the lens position and thus the optical coupling efficiency can be made by actuating the MEMS chip.