论文信息 - Dielectric Constant and Loss Tangent Characterization of Thin High-K Dielectrics Using Corner-to-Corner Plane Probing - 字舞流文

Dielectric Constant and Loss Tangent Characterization of Thin High-K Dielectrics Using Corner-to-Corner Plane Probing

M. Swaminathan | S. Bhattacharya | A. Ege Engin | A. Tambawala | P. Pramanik | K. Yamazaki