A bibliography on silicon nitride films

Abstract A bibliography of ca. 600 references on the preparation, properties and applications of silicon nitride (Si3N4) films has been collected from the literature. The bibliography comprises a list of papers appearing in Chemical Abstracts, journals, conference proceedings and patent abstracts, covering the period from 1966 (when the first article appeared describing an application of silicon nitride films in the solid state technology) through to 1978.