论文信息 - Amorphous carbon films PACVD in CH4–CO2 under pulsed and continuous substrate bias conditions - 字舞流文

Amorphous carbon films PACVD in CH4–CO2 under pulsed and continuous substrate bias conditions

R. Brusa | S. Mariazzi | R. Bartali | G. Gottardi | N. Laidani | L. Calliari | M. Filippi | M. Anderle | C. Macchi