Large-Scale and Flexible Self-Powered Triboelectric Tactile Sensing Array for Sensitive Robot Skin

Advances in flexible and multifunctional electronic devices have enabled the realization of sophisticated skin for robotics applications. In this paper, a large-scale, flexible and self-powered tactile sensing array (TSA) for sensitive robot skin is demonstrated based on the triboelectric effect. The device, with 4 × 4 sensing units, was composed of a top triboelectric polyethylene terephthalate (PET) layer, a bottom triboelectric copper (Cu) layer and a bottom PET substrate. A low-cost roll-to-roll ultraviolet embossing fabrication process was induced to pattern the large-scale top PET film with microstructures for high-output performance. The working mechanism and output performance of the triboelectric TSA were demonstrated and characterized, exhibiting good stability and high sensitivity. By integrating a tactile feedback system, the large-scale TSA, acting as intelligent skin for an industrial robot, was able to realize emergency avoidance and safety stop for various unknown obstacles under various working conditions. The system also has good real-time performance. By using a large-scale roll-to-roll fabrication method, this work pushes forward a significant step to self-powered triboelectric TSA and its potential applications in intelligent robot skin.

[1]  X. Shan,et al.  Large Scale Triboelectric Nanogenerator and Self-Powered Pressure Sensor Array Using Low Cost Roll-to-Roll UV Embossing , 2016, Scientific Reports.

[2]  Yong Qin,et al.  Controllable fabrication of ultrafine oblique organic nanowire arrays and their application in energy harvesting. , 2015, Nanoscale.

[3]  Mengdi Han,et al.  High performance triboelectric nanogenerators based on large-scale mass-fabrication technologies , 2015 .

[4]  Zhong Lin Wang,et al.  Transparent triboelectric nanogenerators and self-powered pressure sensors based on micropatterned plastic films. , 2012, Nano letters.

[5]  W J Stark,et al.  Thermoresponsive Polymer Induced Sweating Surfaces as an Efficient Way to Passively Cool Buildings , 2012, Advanced materials.

[6]  Tao Chen,et al.  The Design and Characterization of a Flexible Tactile Sensing Array for Robot Skin , 2016, Sensors.

[7]  Zhibin Yu,et al.  User-interactive electronic skin for instantaneous pressure visualization. , 2013, Nature materials.

[8]  Long Lin,et al.  Nanoscale triboelectric-effect-enabled energy conversion for sustainably powering portable electronics. , 2012, Nano letters.

[9]  Zhong Lin Wang,et al.  Toward large-scale energy harvesting by a nanoparticle-enhanced triboelectric nanogenerator. , 2013, Nano letters.

[10]  Jun Zhou,et al.  High‐Strain Sensors Based on ZnO Nanowire/Polystyrene Hybridized Flexible Films , 2011, Advanced materials.

[11]  F. Carpi,et al.  Soft dielectrics for capacitive sensing in robot skins: Performance of different elastomer types , 2015 .

[12]  Yonggang Huang,et al.  Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring , 2014, Nature Communications.

[13]  Chengkuo Lee,et al.  Development of a Broadband Triboelectric Energy Harvester With SU-8 Micropillars , 2015, Journal of Microelectromechanical Systems.

[14]  Jun Chen,et al.  Triboelectrification-based organic film nanogenerator for acoustic energy harvesting and self-powered active acoustic sensing. , 2014, ACS nano.

[15]  Deqing Mei,et al.  A flexible capacitive tactile sensor array with high scanning speed for distributed contact force measurements , 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

[16]  Zhong Lin Wang,et al.  Enhanced triboelectric nanogenerators and triboelectric nanosensor using chemically modified TiO2 nanomaterials. , 2013, ACS nano.

[17]  Branko Glisic,et al.  Detection of Steel Fatigue Cracks with Strain Sensing Sheets Based on Large Area Electronics , 2015, Sensors.

[18]  Benjamin C. K. Tee,et al.  Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes. , 2011, Nature nanotechnology.

[19]  Lucia Beccai,et al.  Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger , 2011 .

[20]  Deqing Mei,et al.  Flexible Capacitive Tactile Sensor Array With Truncated Pyramids as Dielectric Layer for Three-Axis Force Measurement , 2015, Journal of Microelectromechanical Systems.

[21]  T. Kobayashi,et al.  Ultra-thin piezoelectric strain sensor 5 × 5 array integrated on flexible printed circuit for structural health monitoring by 2D dynamic strain sensing , 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

[22]  He Tian,et al.  Flexible CNT-array double helices Strain Sensor with high stretchability for Motion Capture , 2015, Scientific Reports.

[23]  Simiao Niu,et al.  Topographically-designed triboelectric nanogenerator via block copolymer self-assembly. , 2014, Nano letters.

[24]  Myeong-Lok Seol,et al.  High-performance nanopattern triboelectric generator by block copolymer lithography , 2015 .

[25]  Evangelos Gogolides,et al.  A flexible capacitive device for pressure and tactile sensing , 2009 .

[26]  Yan Zhang,et al.  Flexible, Stretchable and Wearable Multifunctional Sensor Array as Artificial Electronic Skin for Static and Dynamic Strain Mapping , 2015 .

[27]  Tay Investigation of contact electrification based broadband energy harvesting mechanism using elastic PDMS microstructures , 2014 .

[28]  Guang Zhu,et al.  Self-powered, ultrasensitive, flexible tactile sensors based on contact electrification. , 2014, Nano letters.

[29]  Joo-Yun Jung,et al.  Triboelectric charging sequence induced by surface functionalization as a method to fabricate high performance triboelectric generators. , 2015, ACS nano.

[30]  E. Meng,et al.  High strain biocompatible polydimethylsiloxane-based conductive graphene and multiwalled carbon nanotube nanocomposite strain sensors , 2013 .

[31]  Wen Liu,et al.  A transparent single-friction-surface triboelectric generator and self-powered touch sensor , 2013 .

[32]  Sung-hoon Ahn,et al.  A flexible and highly sensitive strain-gauge sensor using reversible interlocking of nanofibres. , 2012, Nature materials.

[33]  Chunsheng Yang,et al.  A flexible triboelectric-piezoelectric hybrid nanogenerator based on P(VDF-TrFE) nanofibers and PDMS/MWCNT for wearable devices , 2016, Scientific Reports.

[34]  Helge J. Ritter,et al.  Flexible and stretchable fabric-based tactile sensor , 2015, Robotics Auton. Syst..

[35]  Chang Kyu Jeong,et al.  Highly‐Efficient, Flexible Piezoelectric PZT Thin Film Nanogenerator on Plastic Substrates , 2014, Advanced materials.

[36]  Zhong Lin Wang,et al.  Harvesting water wave energy by asymmetric screening of electrostatic charges on a nanostructured hydrophobic thin-film surface. , 2014, ACS nano.

[37]  R. Dauskardt,et al.  An ultra-sensitive resistive pressure sensor based on hollow-sphere microstructure induced elasticity in conducting polymer film , 2014, Nature Communications.

[38]  Zichen Chen,et al.  A flexible capacitive tactile sensor array for prosthetic hand real-time contact force measurement , 2014, 2014 IEEE International Conference on Information and Automation (ICIA).