论文信息 - Acoustic property of PbTiO3/SrTiO3 multilayer structures prepared by MOCVD and PLD methods

Acoustic property of PbTiO3/SrTiO3 multilayer structures prepared by MOCVD and PLD methods

Abstract PbTiO3/SrTiO3 (PT/ST) multilayer structures have been fabricated on Pt/SrTiO3 and Pt/LaAlO3 substrates. The PT layers were prepared by metalorganic chemical vapor deposition (MOCVD) and the ST layers were prepared by pulsed laser deposition (PLD). The typical thickness of each PT and ST layer was 100 nm. The periodic number of the multilayer structures was 3,5,8,10, respectively. X-ray diffraction θ–2θ scan results indicated that the PT layers were (001) oriented in these multilayers. Several sets of acoustic resonators have been made of these mutilayer structures. The high-frequency acoustic resonance properties were analysed with a HP 8510C network analyzer.

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