Varifocal MOEMS fiber scanner for confocal endomicroscopy.

Based on an advanced silicon optical bench technology with integrated MOEMS (Micro-Opto-Electro-Mechanical-System) components, a piezo-driven fiber scanner for confocal microscopy has been developed. This highly-miniaturized technology allows integration into an endoscope with a total outer probe diameter of 2.5 mm. The system features a hydraulically-driven varifocal lens providing axial confocal scanning without any translational movement of components. The demonstrated resolutions are 1.7 μm laterally and 19 μm axially.

[1]  Richard S. Johnston,et al.  A full-color scanning fiber endoscope , 2006, SPIE BiOS.

[2]  B Messerschmidt,et al.  Endoscope-compatible confocal microscope using a gradient index-lens system , 2001 .

[3]  Hongrui Jiang,et al.  Fiber Endoscopes Utilizing Liquid Tunable-Focus Microlenses Actuated Through Infrared Light , 2011, Journal of Microelectromechanical Systems.

[4]  A. Seifert,et al.  A Tunable Optofluidic Silicon Optical Bench , 2012, Journal of Microelectromechanical Systems.

[5]  Y. Sabharwal,et al.  Slit-scanning confocal microendoscope for high-resolution in vivo imaging. , 1999, Applied optics.

[6]  Watt W. Webb,et al.  Multifocal multiphoton endoscope , 2012 .

[7]  G S Kino,et al.  Micromachined scanning confocal optical microscope. , 1996, Optics letters.

[8]  Timothy D. Soper,et al.  Scanning fiber endoscopy with highly flexible, 1 mm catheterscopes for wide‐field, full‐color imaging , 2010, Journal of biophotonics.

[9]  Masayoshi Esashi,et al.  Electromagnetically driven ulutra-miniature single fiber scanner for high-resolution endoscopy fabricated on cylindrical substrates using mems process , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[10]  Fritjof Helmchen,et al.  Miniaturization of Fluorescence Microscopes Using Fibre Optics , 2002, Experimental physiology.

[11]  J. Fujimoto,et al.  Compact piezoelectric transducer fiber scanning probe for optical coherence tomography. , 2014, Optics letters.

[13]  Angelique Kano,et al.  Design and demonstration of a miniature catheter for a confocal microendoscope. , 2004, Applied optics.

[14]  C. J. Chen,et al.  Electromechanical deflections of piezoelectric tubes with quartered electrodes , 1992 .

[15]  Wei Zhang,et al.  Wafer-scale fabricated thermo-pneumatically tunable microlenses , 2014, Light: Science & Applications.

[16]  Thomas D. Wang,et al.  Optical biopsy: a new frontier in endoscopic detection and diagnosis. , 2004, Clinical gastroenterology and hepatology : the official clinical practice journal of the American Gastroenterological Association.

[17]  Hans Zappe,et al.  Chromatic aberration control for tunable all-silicone membrane microlenses. , 2011, Optics express.

[18]  Stefan Sinzinger,et al.  Tunable hyperchromatic lens system for confocal hyperspectral sensing. , 2013, Optics express.

[19]  Kristen C. Maitland,et al.  In vivo imaging of oral neoplasia using a miniaturized fiber optic confocal reflectance microscope. , 2008, Oral oncology.

[20]  Rodrigo Cuenca,et al.  Optical axial scanning in confocal microscopy using an electrically tunable lens. , 2014, Biomedical optics express.

[21]  Eric J Seibel,et al.  Unique features of optical scanning, single fiber endoscopy * ** , 2002, Lasers in surgery and medicine.

[22]  Per G. Reinhall,et al.  Single-fiber flexible endoscope: general design for small size, high resolution, and wide field of view , 2001, European Conference on Biomedical Optics.