A New Approach for Finding Optimum Design of Electrostatic Micromotors

This paper presents a new approach for finding optimum configuration and geometric size of very small variable capacitance side drive micromotors in order to obtain the motor with the highest average output torque and minimum torque ripple. Letting all design parameters vary independently various torque curve characteristics can be calculated for different combinations of pole configuration. Modified circuit model is used for calculation of drive torque, which includes the influence of side planes of both stator and rotor poles, which leads to fast and more accurate estimations. The design process is automatically set up after choosing initial design parameters including initial geometric size.

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