NationalKey LaboratoryFor Electronic MeasurementTechnology, Key LaboratoryofInstrumentation Science Dynamic Measurement, North University ofChina , Taiyuan 030051, China

Based on the typical microcavity quantum property and integration of the planar microtoroid with ultra-high Q value(about 10 8 ), this paper theoretically proposes the design of the micro-optical voltage sensor. The voltage sensor belongs to the field of MOEMS, the entire device is composed of one microtoroid (diameter from 60pm to 120pm) with the ohmic contact in the middle and a fiber taper waveguide. Through contact dot the outside detected voltage is connected with the ohmic contact, as a result of the ohmic contact heat effect, the external voltage signal through the device transforms into a strong frequency shift which is coupled out through the fiber taper waveguide. After that it will be showed on the photoelectric detector and then the voltage value under test could be calculated. Abstract - Based on the typical microcavity quantum property and integration of the planar microtoroid with ultra-high Q value(about 10 8 ), this paper theoretically proposes the design of the micro-optical voltage sensor. The voltage sensor belongs to the field of MOEMS, the entire device is composed of one microtoroid (diameter from 60pm to 120pm) with the ohmic contact in the middle and a fiber taper waveguide. Through contact dot the outside detected voltage is connected with the ohmic contact, as a result of the ohmic contact heat effect, the external voltage signal through the device transforms into a strong frequency shift which is coupled out through the fiber taper waveguide. After that it will be showed on the photoelectric detector and then the voltage value under test could be calculated.

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