Rapidly tunable and highly reversible bio-inspired dry adhesion for transfer printing in air and a vacuum.

Tunable and reversible dry adhesion has attracted much attention in academia and industry due to its wide applications ranging from releasable joints to stamps for transfer printing. Here, a simple yet robust magnetically actuated, aphid-inspired design of an elastomeric surface that provides rapidly tunable and highly reversible adhesion strength is reported. The magnetically actuated adhesive features open reservoirs filled with magnetic particles and encapsulated by a thin surface membrane, which can be deformed in a controlled manner via the magnetic field, thus, to tune the adhesion. The combination of the rate dependent effect and magnetic actuation of the thin surface membrane offers continuously tunable adhesion with a great switchability and a quick response. Experimental and theoretical studies reveal the underlying physics and provide design guidelines to optimize geometries for the broad control of adhesion. Demonstrations of this concept in stamps for transfer printing of silicon wafers in air and in a vacuum with a selective and programmable mode illustrate the capabilities for deterministic assembly and the potential in the semiconductor industry.

[1]  Nigel E. Stork,et al.  The adherence of beetle tarsal setae to glass , 1983 .

[2]  Li Yu,et al.  Smart biomimetic micro/nanostructures based on liquid crystal elastomers and networks. , 2017, Soft matter.

[3]  Metin Sitti,et al.  Waalbot II: Adhesion Recovery and Improved Performance of a Climbing Robot using Fibrillar Adhesives , 2011, Int. J. Robotics Res..

[4]  John A. Rogers,et al.  Mechanics of reversible adhesion , 2011 .

[5]  Elmar Kroner,et al.  Switchable Adhesion in Vacuum Using Bio-Inspired Dry Adhesives , 2015, ACS applied materials & interfaces.

[6]  Insol Hwang,et al.  Bio-inspired adhesive systems for next-generation green manufacturing , 2014 .

[7]  M. Yanik.  Towards gecko-feet-inspired bandages. , 2009, Trends in biotechnology.

[8]  Xiaolin Zheng,et al.  Fabricating nanowire devices on diverse substrates by simple transfer-printing methods , 2010, Proceedings of the National Academy of Sciences.

[9]  John A Rogers,et al.  Competing fracture in kinetically controlled transfer printing. , 2007, Langmuir : the ACS journal of surfaces and colloids.

[10]  Robert Langer,et al.  A biodegradable and biocompatible gecko-inspired tissue adhesive , 2008, Proceedings of the National Academy of Sciences.

[11]  M. Kwak,et al.  Scalable and continuous fabrication of bio-inspired dry adhesives with a thermosetting polymer. , 2018, Soft matter.

[12]  Hongta Yang,et al.  Octopus-Inspired Assembly of Nanosucker Arrays for Dry/Wet Adhesion. , 2017, ACS nano.

[13]  Kristin L. Wood,et al.  A state-of-the-art review and analysis on the design of dry adhesion materials for applications such as climbing micro-robots , 2015 .

[14]  Thomas A. McMahon,et al.  Biomechanics of the movable pretarsal adhesive organ in ants and bees , 2001, Proceedings of the National Academy of Sciences of the United States of America.

[15]  Mark R. Cutkosky,et al.  Smooth Vertical Surface Climbing With Directional Adhesion , 2008, IEEE Transactions on Robotics.

[16]  Huanyu Cheng,et al.  Shear-enhanced adhesiveless transfer printing for use in deterministic materials assembly , 2011 .

[17]  Robert Lacombe,et al.  Adhesion Measurement Methods: Theory and Practice , 2005 .

[18]  R. Full,et al.  An Integrative Study of Insect Adhesion: Mechanics and Wet Adhesion of Pretarsal Pads in Ants1 , 2002, Integrative and comparative biology.

[19]  Yu Tian,et al.  Controllable Anisotropic Dry Adhesion in Vacuum: Gecko Inspired Wedged Surface Fabricated with Ultraprecision Diamond Cutting , 2017 .

[20]  A gecko-inspired double-sided adhesive. , 2013, Physical chemistry chemical physics : PCCP.

[21]  David Labonte,et al.  Rate-dependence of 'wet' biological adhesives and the function of the pad secretion in insects. , 2015, Soft matter.

[22]  Huanyu Cheng,et al.  Enhanced adhesion with pedestal-shaped elastomeric stamps for transfer printing , 2012 .

[23]  K. Suh,et al.  A nontransferring dry adhesive with hierarchical polymer nanohairs , 2009, Proceedings of the National Academy of Sciences.

[24]  K. Suh,et al.  Instantly switchable adhesion of bridged fibrillar adhesive via gecko-inspired detachment mechanism and its application to a transportation system. , 2013, Nanoscale.

[25]  Yonggang Huang,et al.  Transfer printing by kinetic control of adhesion to an elastomeric stamp , 2006 .

[26]  Z. Dai,et al.  Transfer of vertically aligned carbon nanotube arrays onto flexible substrates for gecko-inspired dry adhesive application , 2015 .

[27]  Sang Il Rhee,et al.  The Use of Shape Memory Polymers for Microassembly by Transfer Printing , 2014, Journal of Microelectromechanical Systems.

[28]  Yonggang Huang,et al.  Laser-Driven Micro Transfer Placement of Prefabricated Microstructures , 2012, Journal of Microelectromechanical Systems.

[29]  Metin Sitti,et al.  Soft Grippers Using Micro‐fibrillar Adhesives for Transfer Printing , 2014, Advanced materials.

[30]  Adhesion control by inflation: implications from biology to artificial attachment device , 2014 .

[31]  Nicola Pugno,et al.  Spatulate structures in biological fibrillar adhesion , 2010 .

[32]  Boxin Zhao,et al.  Thermally Active Liquid Crystal Network Gripper Mimicking the Self‐Peeling of Gecko Toe Pads , 2017, Advanced materials.

[33]  Placid Mathew Ferreira,et al.  Active, Programmable Elastomeric Surfaces with Tunable Adhesion for Deterministic Assembly by Transfer Printing , 2012 .

[34]  Material transfer controlled by elastomeric layer thickness , 2014 .

[35]  M. Cutkosky,et al.  The Gecko’s Toe: Scaling Directional Adhesives for Climbing Applications , 2013, IEEE/ASME Transactions on Mechatronics.

[36]  Carlo Menon,et al.  Abigaille II: toward the development of a spider-inspired climbing robot , 2011, Robotica.

[37]  Huanyu Cheng,et al.  Elastomer Surfaces with Directionally Dependent Adhesion Strength and Their Use in Transfer Printing with Continuous Roll‐to‐Roll Applications , 2012, Advanced materials.

[38]  Metin Sitti,et al.  Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing , 2010, Proceedings of the National Academy of Sciences.

[39]  E. Arzt,et al.  Hierarchical bioinspired adhesive surfaces—a review , 2016, Bioinspiration & biomimetics.

[40]  Xue Feng,et al.  Direct Laser Writing-Based Programmable Transfer Printing via Bioinspired Shape Memory Reversible Adhesive. , 2016, ACS applied materials & interfaces.

[41]  Metin Sitti,et al.  Gecko-inspired controllable adhesive structures applied to micromanipulation , 2012 .

[42]  Wan Kyun Chung,et al.  Unscented FastSLAM: A Robust and Efficient Solution to the SLAM Problem , 2008, IEEE Transactions on Robotics.