Ion–Molecule Reactions in a 50‐MHz Discharge

Extensive investigations of the dependence of the relative ionic composition of a high‐frequency plasma on the discharge conditions (particularly the pressure) and of the relative ionic composition of the plasma as a function of the translational energy of the ions issuing from the orifice of the sampling probe at constant pressure were made by the use of a quadrupole mass spectrometer employing a retarding‐potential grid system. The results indicate that the ions collected and observed are formed in a narrow region in the plasma (approximately 1 mm in depth) in front of the probe orifice and that these ions gain most of their energy from the electric field of the sheath in a distance that is much less than a reaction mean‐free path (∼0.01 mm). The average time available for reaction (reaction time) was a few tenths of a microsecond and independent of the vessel geometry and dimensions. The reaction time was relatively insensitive to changes in pressure and was reasonably constant for ions in several diff...

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