Gallium nitride MEMS resonators: how residual stress impacts design and performances
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L. Buchaillot | D. Théron | M. Germain | P. Tilmant | F. Vaurette | J. Derluyn | B. Grimbert | M. Faucher | V. Avramovic | E. Okada | V. Zhang | I. Roch-Jeune | S. Degroote | V. Brandli | Christophe Morelle | I. Roch‐Jeune | C. Morelle