Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons.
暂无分享,去创建一个
Chunlei Du | Xiangang Luo | Qiling Deng | Xiaochun Dong | Xingzhan Wei | C. Du | Qi-ling Deng | Xiaochun Dong | Xingzhan Wei | Yudong Zhang | Yudong Zhang | Xiangang Luo
[1] M. Stockman,et al. Nanofocusing of optical energy in tapered plasmonic waveguides. , 2004, Physical review letters.
[2] Xiangang Luo,et al. Subwavelength photolithography based on surface-plasmon polariton resonance. , 2004, Optics express.
[3] J. Goodberlet,et al. Patterning Sub-50 nm features with near-field embedded-amplitude masks , 2002 .
[4] Chunlei Du,et al. Localized surface plasmon nanolithography with ultrahigh resolution. , 2007, Optics express.
[5] Jerome P. Silverman,et al. Challenges and progress in x-ray lithography , 1998 .
[6] D. Bergman,et al. Localization versus delocalization of surface plasmons in nanosystems: can one state have both characteristics? , 2001, Physical review letters.
[7] A. Bouhelier,et al. Plasmon‐coupled tip‐enhanced near‐field optical microscopy , 2003, Journal of microscopy.
[8] Anatoly V. Zayats,et al. Near-field photonics: surface plasmon polaritons and localized surface plasmons , 2003 .
[9] M. Switkes,et al. Immersion lithography at 157 nm , 2001 .
[10] Roderick R. Kunz,et al. 157 nm: Deepest deep-ultraviolet yet , 1999 .
[11] John Melngailis,et al. Focused ion beam lithography , 1991 .
[12] R. H. Stulen,et al. Extreme ultraviolet lithography , 1998 .
[13] Xiang Zhang,et al. Surface plasmon interference nanolithography. , 2005, Nano letters.
[14] Xiangang Luo,et al. Surface plasmon resonant interference nanolithography technique , 2004 .
[15] R. W. Christy,et al. Optical Constants of the Noble Metals , 1972 .
[16] R. Blaikie,et al. Sub-diffraction-limited patterning using evanescent near-field optical lithography , 1999 .
[17] A. Maradudin,et al. Nano-optics of surface plasmon polaritons , 2005 .
[18] Mark A. McCord,et al. Electron beam lithography for 0.13 μm manufacturing , 1997 .
[19] D. Bergman,et al. Self-similar chain of metal nanospheres as efficient nanolens , 2003, InternationalQuantum Electronics Conference, 2004. (IQEC)..
[20] W. Hinsberg,et al. Liquid immersion deep-ultraviolet interferometric lithography , 1999 .