论文信息 - Production of atomic nitrogen ion beams

Production of atomic nitrogen ion beams

A small multicusp ion source has been used to generate beams of nitrogen ions. To achieve a high percentage of N+ ions, the source was equipped with a magnetic filter and operated with a high N2 gas density. A nearly pure atomic nitrogen ion (N+) beam (98.5% N+, 1.5% N2+), suitable for implantation purposes, was produced. The operating characteristics of this source, including species mix, are presented.

K. Leung | S. Walther | W. Kunkel

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