Multidimensional chemical sensors for chip-scale electronic packages

The study of dimethylamineborane, as the reducing agent in electroless deposition of gold, was conducted using electrochemical, elemental and spectroscopic methods. The validity of the mixed potential theory of electroless deposition of metals was used to explain the influence of fluctuating chemical concentrations in the bath. Experimental measurements showed that plating rate depends on the fluctuating concentrations of gold, hydroxide, cyanide and the reducing agents among other variables. The fluctuating chemical concentrations can be monitored using the novel automated chemical sensors discussed.