论文信息 - Initial nitride formation at Si∕3C–SiC(100)3×2 interface by oxynitridation - 字舞流文

Initial nitride formation at Si∕3C–SiC(100)3×2 interface by oxynitridation

C. Radtke | J. Arnault | P. Soukiassian | H. Enriquez | C. Crotti | P. Perfetti | P. Moras