Preparation of multi-layer film consisting of hydrogen-free DLC and nitrogen-containing DLC for conductive hard coating
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S. Kaneko | H. Takikawa | Y. Suda | T. Harigai | S. Kunitsugu | M. Kamiya | H. Yasui | Ryo Isono | M. Taki | Tsuyoshi Tanimoto | Y. Iijima | Satoshi Degai | R. Isono