Characterization of the Piezoelectric Properties of Pb0.98Ba0.02(Mg1/3Nb2/3)O3–PbTiO3 Epitaxial Thin Films

Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN–PT) (70/30) thin films were deposited by pulsed laser deposition using two growth strategies: adsorption controlled deposition from lead-rich targets (∼25–30 mass%) and lower-temperature deposition (Td≤600°C) from targets containing a small amount of excess lead oxide (≤3 mass %). The substrates used were (001) SrRuO3/LaAlO3. Typical remanent polarization values ranged between 12 and 14 μC/cm2 for these films. The longitudinal piezoelectric coefficient (d33,f) was measured using in situ four-circle X-ray diffraction, and the transverse coefficient (d31,f or e31,f) was measured using the wafer flexure method. d33,f and e31,f coefficients of ∼300–350 pm/V and ∼−11 C/m2 were calculated, respectively. In general, the piezoelectric coefficients and aging rates were strongly asymmetric, suggesting the presence of a polarization bias. The large, extremely stable piezoelectric response that results from poling parallel to the preferred polarization direction is attractive for miniaturized sensors and actuators.

[1]  J. Maria,et al.  The influence of energetic bombardment on the structure and properties of epitaxial SrRuO3 thin films grown by pulsed laser deposition , 1998 .

[2]  Dragan Damjanovic,et al.  Piezoelectric properties of rhombohedral Pb(Zr, Ti)O3 thin films with (100), (111), and “random” crystallographic orientation , 2000 .

[3]  S. Trolier-McKinstry,et al.  Growth and piezoelectric properties of Pb(Yb1/2Nb1/2)O3−PbTiO3 epitaxial films , 2002 .

[4]  S. Trolier-McKinstry,et al.  Dielectric and piezoelectric properties of sol–gel derived lead magnesium niobium titanate films with different textures , 2001 .

[5]  M.-A. Dubois,et al.  PZT thin film actuated elastic fin micromotor , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  J. F. Shepard,et al.  The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films , 1998 .

[7]  W. Hackenberger,et al.  PHASE DEVELOPMENT AND ELECTRICAL PROPERTY ANALYSIS OF PULSED LASER DEPOSITED PB(MG1/3NB2/3)O3-PBTIO3 (70/30) EPITAXIAL THIN FILMS , 1998 .

[8]  T. Watkins,et al.  Residual stress in deuterium implanted nominal copper coatings , 2000 .

[9]  D. Polla,et al.  PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS , 1998 .

[10]  Susan Trolier-McKinstry,et al.  Temperature dependence of the piezoelectric response in lead zirconate titanate films , 2004 .

[11]  S. Trolier-McKinstry,et al.  Thin Film Piezoelectrics for MEMS , 2004 .

[12]  Fei Xu,et al.  Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films , 2001 .

[13]  K.K. Li,et al.  Micromachined high frequency ferroelectric sonar transducers , 1997, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[14]  Yu Wang,et al.  Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers , 2003 .

[15]  M. Kurosawa,et al.  A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer) , 2000 .

[16]  Nava Setter,et al.  Interferometric measurements of electric field-induced displacements in piezoelectric thin films , 1996 .

[17]  R. Polcawich,et al.  Piezoelectric and dielectric reliability of lead zirconate titanate thin films , 2000 .

[18]  Hannes Bleuler,et al.  Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation , 2002 .

[19]  Hyo-Jin Nam,et al.  PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage , 2001 .

[20]  T. Shrout,et al.  Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals , 1997 .

[21]  S. J. Gross,et al.  Lead-zirconate-titanate-based piezoelectric micromachined switch , 2003 .

[22]  Nicolas Ledermann,et al.  {1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties , 2003 .