III-V nitrides—important future electronic materials

The present stage of development for the AlN-GaN-InN class of III-V nitrides is reviewed, with emphasis on the electronic properties of the materials. We also briefly cover the most important types of device structures presently under study, as well as application areas for III-nitride devices now foreseen. A brief overview of the main growth techniques is presented, since a further development of the growth of these materials is indeed the key towards a desired substantial improvement in material quality. This is needed both for the establishment of definite data for physical parameters, as well as for the proper functioning of most devices. The basic band structure as well as excitonic properties are briefly discussed. It is pointed out that these materials are in most cases excitonic at room temperature, for bulk as well as for quantum structures. Doping and properties of donors and acceptors are highlighted, here, in particular, the parameters for shallow acceptors, such as their binding energies, are far from well known. There is no complete picture of the identification of characteristic optical spectra (such as bound exciton spectra) with specific donors and acceptors. The properties of defects, in particular dislocations which are very abundant in the heteroepitaxial material studied today, are discussed. Dislocations may not themselves be severe recombination centers, and the degradation of active devices via dislocation climb seems to be absent in III-nitrides. The progress in the area of heterostructures and quantum wells based on the AlGaN/GaN and the InGaN/GaN systems is reviewed, in relation to the present strong development of related devices. An interesting observation is the importance of the piezoelectric effect, due to a strong built-in strain in most structures. Application areas cover a very broad range in optoelectronics, but also high frequency power devices, with applications for example in satellite communication systems.

[1]  Shuji Nakamura,et al.  Role of self-formed InGaN quantum dots for exciton localization in the purple laser diode emitting at 420 nm , 1997 .

[2]  Inspec,et al.  Properties of group III nitrides , 1994 .

[3]  S. Nakamura,et al.  Spontaneous emission of localized excitons in InGaN single and multiquantum well structures , 1996 .

[4]  C. Kuo,et al.  ACTIVATION ENERGIES OF SI DONORS IN GAN , 1996 .

[5]  W. J. Choyke,et al.  Cathodoluminescence of AlN–GaN short period superlattices , 1996 .

[6]  M. Asif Khan,et al.  Metastability and persistent photoconductivity in Mg‐doped p‐type GaN , 1996 .

[7]  M. Asif Khan,et al.  Metal semiconductor field effect transistor based on single crystal GaN , 1993 .

[8]  Greiner,et al.  p- and n-type cubic GaN epilayers on GaAs. , 1996, Physical review. B, Condensed matter.

[9]  The influence of the deformation on the two-dimensional electron gas density in GaN–AlGaN heterostructures , 1998 .

[10]  Masahiko Shimada,et al.  Preparation of GaN single crystals using a Na flux , 1997 .

[11]  Akira Sakai,et al.  Thick GaN Epitaxial Growth with Low Dislocation Density by Hydride Vapor Phase Epitaxy , 1997 .

[12]  M. S. Skolnick,et al.  Observation of a many-body edge singularity in quantum well luminescence spectra. , 1987, Physical review letters.

[13]  Oliver Brandt,et al.  High p‐type conductivity in cubic GaN/GaAs(113)A by using Be as the acceptor and O as the codopant , 1996 .

[14]  B. Monemar,et al.  Properties of Zn‐doped VPE‐grown GaN. I. Luminescence data in relation to doping conditions , 1980 .

[15]  V. Härle,et al.  Relaxation of thermal strain in GaN epitaxial layers grown on sapphire , 1997 .

[16]  Lester F. Eastman,et al.  Scattering of electrons at threading dislocations in GaN , 1998 .

[17]  H. Amano,et al.  Photoluminescence decay dynamics in an InGaN/GaN/AlGaN single quantum well , 1997 .

[18]  S. Sakai,et al.  Nucleation Control in the Growth of Bulk GaN by Sublimation Method , 1997 .

[19]  S. Nakamura InGaN/AlGaN blue-light-emitting diodes , 1995 .

[20]  J. Bergman,et al.  Influence of potential fluctuations on electrical transport and optical properties in modulation-doped G a N / A l 0.28 Ga 0.72 N heterostructures , 1998 .

[21]  Kovalev,et al.  Properties of the yellow luminescence in undoped GaN epitaxial layers. , 1995, Physical review. B, Condensed matter.

[22]  C. T. Foxon,et al.  Lattice parameters of gallium nitride , 1996 .

[23]  R. D. Metcalfe,et al.  Growth and properties of GaxAl1-xN compounds , 1978 .

[24]  R. Davis,et al.  Sublimation growth and characterization of bulk aluminum nitride single crystals , 1997 .

[25]  Marc Ilegems,et al.  Luminescence of Be‐ and Mg‐doped GaN , 1973 .

[26]  Isamu Akasaki,et al.  Quantum-Confined Stark Effect due to Piezoelectric Fields in GaInN Strained Quantum Wells , 1997 .

[27]  Seoung-Hwan Park,et al.  Optical gain of strained hexagonal and cubic GaN quantum‐well lasers , 1996 .

[28]  M. Nardelli,et al.  Theory of interfaces and surfaces in wide-gap nitrides , 1997 .

[29]  J. Zolper,et al.  Hydrogen passivation of Ca acceptors in GaN , 1996 .

[30]  H. Morkoç,et al.  Reactive molecular beam epitaxy of wurtzite GaN: Materials characteristics and growth kinetics , 1996 .

[31]  S. Nakamura,et al.  Biaxial strain dependence of exciton resonance energies in wurtzite GaN , 1997 .

[32]  J. Hutchby,et al.  Photoluminescence of ion‐implanted GaN , 1976 .

[33]  Kwiseon Kim,et al.  Electronic and optical properties of the group-III nitrides, their heterostructures and alloys , 1995 .

[34]  K. Reimann,et al.  Two-photon spectroscopy in GaN , 1997 .

[35]  S. Pearton,et al.  Photoluminescence, reflectance, and magnetospectroscopy of shallow excitons in GaN , 1997 .

[36]  Vladimir Dmitriev,et al.  ELECTRIC BREAKDOWN IN GAN P-N JUNCTIONS , 1996 .

[37]  Shuji Nakamura,et al.  Recombination dynamics of localized excitons in In 0.20 Ga 0.80 N- In 0.05 Ga 0.95 N multiple quantum wells , 1997 .

[38]  Takashi Mukai,et al.  High-Power GaN P-N Junction Blue-Light-Emitting Diodes , 1991 .

[39]  C. Walle,et al.  Small valence-band offsets at GaN/InGaN heterojunctions , 1997 .

[40]  S. Pearton,et al.  Outdiffusion of deuterium from GaN, AlN, and InN , 1995 .

[41]  Bo Monemar,et al.  Luminescence in epitaxial GaN : Cd , 1974 .

[42]  J. Bergman,et al.  Exciton Lifetimes in GaN , 1995 .

[43]  W. Knap,et al.  Determination of the effective mass of GaN from infrared reflectivity and Hall effect , 1996 .

[44]  A. Koukitu,et al.  Thermodynamic analysis of the MOVPE growth of InxGa1-xN , 1997 .

[45]  J. Pankove,et al.  Epitaxially grown AlN and its optical band gap , 1973 .

[46]  A. Koukitu,et al.  Vapor phase epitaxy of InN using InCl and InCl3 sources , 1997 .

[47]  J. Bernholc,et al.  Amphoteric properties of substitutional carbon impurity in GaN and AlN , 1996 .

[48]  H. Amano,et al.  The growth of thick GaN film on sapphire substrate by using ZnO buffer layer , 1993 .

[49]  Chang-Hee Hong,et al.  Magnesium acceptor levels in GaN studied by photoluminescence , 1998 .

[50]  Bernard Gil,et al.  Raman determination of phonon deformation potentials in α-GaN , 1996 .

[51]  J. Pankove,et al.  Chapter 9 Doping in the III-Nitrides , 1997 .

[52]  Tanakorn Osotchan,et al.  Electron mobilities in gallium, indium, and aluminum nitrides , 1994 .

[53]  Theodore D. Moustakas,et al.  Metal contacts to gallium nitride , 1993 .

[54]  J. Bergman,et al.  Optical characterisation of GaN and related materials , 1997 .

[55]  E. Haller,et al.  PRESSURE INDUCED DEEP GAP STATE OF OXYGEN IN GAN , 1997 .

[56]  Noble M. Johnson,et al.  Growth of gallium nitride by hydride vapor-phase epitaxy , 1997 .

[57]  Krüger,et al.  Strain-related phenomena in GaN thin films. , 1996, Physical review. B, Condensed matter.

[58]  D. Chadi,et al.  Stability of deep donor and acceptor centers in GaN, AlN, and BN , 1997 .

[59]  C. T. Foxon,et al.  Effects of substrate type on the characteristics of GaN epitaxial films grown by molecular beam epitaxy , 1997 .

[60]  Michael S. Shur,et al.  Electron transport in AlGaN–GaN heterostructures grown on 6H–SiC substrates , 1998 .

[61]  M. Tlaczala,et al.  Preparation of InN epitaxial layers in InCl3NH3 system , 1977 .

[62]  Piotr Perlin,et al.  Temperature dependence of the energy gap in GaN bulk single crystals and epitaxial layer , 1994 .

[63]  W. J. Moore,et al.  Zeeman spectroscopy of shallow donors in GaN , 1997 .

[64]  H. K. Ng,et al.  Magneto‐optical studies of GaN and GaN/AlxGa1−xN: Donor Zeeman spectroscopy and two dimensional electron gas cyclotron resonance , 1996 .

[65]  Briggs,et al.  Native defects in gallium nitride. , 1995, Physical review. B, Condensed matter.

[66]  Harris,et al.  Influence of interface localization on the binding energy of acceptor bound excitons in narrow GaAs/AlxGa1-xAs quantum wells. , 1995, Physical review. B, Condensed matter.

[67]  Shuji Nakamura,et al.  The Blue Laser Diode: GaN based Light Emitters and Lasers , 1997 .

[68]  J. Bergman,et al.  PHOTOLUMINESCENCE RELATED TO THE TWO-DIMENSIONAL ELECTRON GAS AT A GAN/ALGAN HETEROINTERFACE , 1996 .

[69]  B. Monemar,et al.  Properties of Zn‐doped VPE‐grown GaN. II. Optical cross sections , 1980 .

[70]  N. Newman,et al.  p‐type gallium nitride by reactive ion‐beam molecular beam epitaxy with ion implantation, diffusion, or coevaporation of Mg , 1994 .

[71]  J. Pankove,et al.  Properties of Zn‐doped GaN. I. Photoluminescence , 1974 .

[72]  Harold M. Manasevit,et al.  Single-crystal gallium arsenide on insulating substrates , 1968 .

[73]  Robert F. Davis,et al.  Lateral epitaxy of low defect density GaN layers via organometallic vapor phase epitaxy , 1997 .

[74]  B. Monemar,et al.  Variation of lattice parameters in GaN with stoichiometry and doping , 1979 .

[75]  David P. Bour,et al.  Spatial distribution of the luminescence in GaN thin films , 1996 .

[76]  Michael Kunzer,et al.  Nature of the 2.8 eV photoluminescence band in Mg doped GaN , 1998 .

[77]  B. Šantić,et al.  Ionized donor bound excitons in GaN , 1997 .

[78]  Van de Walle CG,et al.  Hydrogen in GaN: Novel aspects of a common impurity. , 1995, Physical review letters.

[79]  Michael Kneissl,et al.  Metastability of Oxygen Donors in AlGaN , 1998 .

[80]  Hadis Morkoç,et al.  Valence‐band discontinuities of wurtzite GaN, AlN, and InN heterojunctions measured by x‐ray photoemission spectroscopy , 1996 .

[82]  Masahiko Sano,et al.  CONTINUOUS-WAVE OPERATION OF INGAN/GAN/ALGAN-BASED LASER DIODES GROWN ON GAN SUBSTRATES , 1998 .

[83]  Marco Buongiorno Nardelli,et al.  Polarization field effects on the electron-hole recombination dynamics in In0.2Ga0.8N/In1−xGaxN multiple quantum wells , 1997 .

[84]  B. Monemar Chapter 11 Optical Properties of GaN , 1997 .

[85]  Joan M. Redwing,et al.  A near‐field scanning optical microscopy study of the photoluminescence from GaN films , 1996 .

[86]  S. Chichibu,et al.  Growth and characterization of cubic GaN , 1997 .

[87]  A. Nurmikko,et al.  TOPICAL REVIEW: Blue and green semiconductor lasers: a status report , 1997 .

[88]  M. Shur,et al.  Cyclotron resonance and quantum Hall effect studies of the two-dimensional electron gas confined at the GaN/AlGaN interface , 1997 .

[89]  J. J. Tietjen,et al.  THE PREPARATION AND PROPERTIES OF VAPOR‐DEPOSITED SINGLE‐CRYSTAL‐LINE GaN , 1969 .

[90]  K. Hiramatsu,et al.  Selective growth of wurtzite GaN and AlxGa1-xN on GaN/sapphire substrates by metalorganic vapor phase epitaxy , 1994 .

[91]  Theeradetch Detchprohm,et al.  Shallow donors in GaN—The binding energy and the electron effective mass , 1995 .

[92]  K. Korona,et al.  POLARITON EFFECTS IN REFLECTANCE AND EMISSION SPECTRA OF HOMOEPITAXIAL GAN , 1997 .

[93]  Sven Öberg,et al.  Theory of Threading Edge and Screw Dislocations in GaN , 1997 .

[94]  J. Bergman,et al.  INTRINSIC OPTICAL PROPERTIES OF GAN EPILAYERS GROWN ON SIC SUBSTRATES : EFFECT OF THE BUILT-IN STRAIN , 1996 .

[95]  D. C. Reynolds,et al.  Identification of an ionized-donor-bound-exciton transition in GaN , 1997 .

[96]  R. Molnar,et al.  Strain determination in heteroepitaxial GaN , 1997 .

[97]  J. W. Matthews,et al.  Defects in epitaxial multilayers: I. Misfit dislocations* , 1974 .

[98]  M.A. Khan,et al.  0.12-μm gate III-V nitride HFET's with high contact resistances , 1997, IEEE Electron Device Letters.

[99]  M. Shur,et al.  Two‐dimensional electron gas in GaN–AlGaN heterostructures deposited using trimethylamine‐alane as the aluminum source in low pressure metalorganic chemical vapor deposition , 1995 .

[100]  Hadis Morkoç,et al.  Emerging gallium nitride based devices , 1995, Proc. IEEE.

[101]  Suski,et al.  Towards the identification of the dominant donor in GaN. , 1995, Physical review letters.

[102]  Paul A. Crowell,et al.  Near-field scanning optical spectroscopy of an InGaN quantum well , 1998 .

[103]  S. Denbaars,et al.  Chapter 2 Metalorganic Chemical Vapor Deposition (MOCVD) of Group III Nitrides , 1997 .

[104]  K. Hiramatsu,et al.  The Composition Pulling Effect in InGaN Growth on the GaN and AlGaN Epitaxial Layers Grown by MOVPE , 1996 .

[105]  Shun Lien Chuang,et al.  k.p method for strained wurtzite semiconductors , 1996 .

[106]  E. Ejder Growth and morphology of GaN , 1974 .

[107]  Henryk Temkin,et al.  Low noise p-π-n GaN ultraviolet photodetectors , 1997 .

[108]  Jörg Neugebauer,et al.  Gallium vacancies and the yellow luminescence in GaN , 1996 .

[109]  Eugene E. Haller,et al.  On p-type doping in GaN—acceptor binding energies , 1995 .

[110]  B. Monemar Electronic structure and bound excitons for defects in semiconductors from optical spectroscopy , 1988 .

[111]  J. Pankove,et al.  High-Power High-Temperature Heterobipolar TransistorWith Gallium Nitride Emitter , 1996 .

[112]  Hunter,et al.  UV reflectivity of GaN: Theory and experiment. , 1995, Physical review. B, Condensed matter.

[113]  Theeradetch Detchprohm,et al.  Determination of the Conduction Band Electron Effective Mass in Hexagonal GaN , 1995 .

[114]  P. Vogl,et al.  Electronic Structure of Biaxially-Strained Wurtzite Crystals GaN and AlN , 1996 .

[115]  Michael Kunzer,et al.  Determination of the GaN/AlN band offset via the (/0) acceptor level of iron , 1994 .

[116]  Michael S. Shur,et al.  Piezoeffect and gate current in AlGaN/GaN high electron mobility transistors , 1997 .

[117]  Isamu Akasaki,et al.  Growth and Luminescence Properties of Mg‐Doped GaN Prepared by MOVPE , 1990 .

[118]  Hadis Morkoç,et al.  Valence-band discontinuity between GaN and AlN measured by x-ray photoemission spectroscopy , 1994 .

[119]  H. Amano,et al.  Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer , 1986 .

[120]  Hadis Morkoç,et al.  Chapter 8 Electronic and Optical Properties of III–V Nitride based Quantum Wells and Superlattices , 1997 .

[121]  H. Amano,et al.  Effects of the buffer layer in metalorganic vapour phase epitaxy of GaN on sapphire substrate , 1988 .

[122]  D. Schikora,et al.  The near band edge photoluminescence of cubic GaN epilayers , 1997 .

[123]  B. Monemar,et al.  Time-resolved spectroscopy of Zn- and Cd-doped GaN , 1987 .

[124]  R. Street,et al.  Activation of acceptors in Mg-doped GaN grown by metalorganic chemical vapor deposition , 1996 .

[125]  Van de Walle CG,et al.  Atomic geometry and electronic structure of native defects in GaN. , 1994, Physical review. B, Condensed matter.

[126]  M. Shur,et al.  The Velocity-Field Characteristic Of Indium Nitride , 1997 .

[127]  G. A. Slack,et al.  Growth of high purity AlN crystals , 1976 .

[128]  Z. Liliental-Weber,et al.  Nano-Tubes in GaN , 1996 .

[129]  L. Dobrzyński,et al.  Observation Of Native Ga Vacancies In Gan By Positron Annihilation , 1997 .

[130]  H. Hovel,et al.  Electrical and Optical Properties of rf‐Sputtered GaN and InN , 1972 .

[131]  H. Morkoç,et al.  GaN, AlN, and InN: A review , 1992 .

[132]  Bo Monemar,et al.  Fundamental energy gap of GaN from photoluminescence excitation spectra , 1974 .

[133]  T. Moustakas,et al.  Thermal expansion of gallium nitride , 1994 .

[134]  K. Vassilevski,et al.  AIN/GaN and AIGaN/GaN Heterostructures Grown by HVPE on SiC Substrates , 1997 .

[135]  Gil,et al.  Valence-band physics and the optical properties of GaN epilayers grown onto sapphire with wurtzite symmetry. , 1995, Physical review. B, Condensed matter.

[136]  P. Petroff,et al.  Defect structure introduced during operation of heterojunction GaAs lasers , 1973 .

[137]  Fischer,et al.  New approach in equilibrium theory for strained layer relaxation. , 1994, Physical review letters.

[138]  Yang,et al.  Picosecond dynamics of excitons in cubic GaN. , 1995, Physical review. B, Condensed matter.

[139]  Yongjo Park,et al.  Excitation density dependence of photoluminescence in GaN:Mg , 1998 .

[140]  Isamu Akasaki,et al.  Crystal Growth and Conductivity Control of Group III Nitride Semiconductors and Their Application to Short Wavelength Light Emitters , 1997 .