We have constructed a laser measurement system for automatic calibration of a height-setting micrometer (HSM). The automation is accomplished by an interactive software tool which performs essential calibration functions. The instrument incorporates a double-frequency-stabilized laser whose operation is based on the heterodyne measurement technique. Positioning of the HSM is undertaken by using an X - Y stage driven by servo motors and calibration is performed by combining laser and electronic probe readings. Abbe offset error is eliminated by using a double-path interferometer scheme. The instrument has measurement range 0 - 350 mm, resolution 40 nm and expanded uncertainty of height measurement better than at the 95% confidence level over the full range. The whole calibration procedure can be completed in 2 h, making it much more efficient than the conventional method of gauge-block comparison. The instrument can also be applied to various linear measurements with high accuracy to reduce the measuring time.
[1]
H Darnedde,et al.
High-precision Calibration of Long Gauge Blocks Using the Vacuum Wavelength Comparator
,
1992
.
[2]
K. P. Birch,et al.
An Updated Edln Equation for the Refractive Index of Air
,
1993
.
[3]
K. P. Birch,et al.
LETTER TO THE EDITOR: Correction to the Updated Edln Equation for the Refractive Index of Air
,
1994
.
[4]
Erkki Ikonen,et al.
Gauge-block Interferometer based on one Stabilized Laser and a White-light Source
,
1993
.
[5]
J. Beers,et al.
SHORT COMMUNICATION: Verification of Revised Water Vapour Correction to the Index of Refraction of Air
,
1992
.
[6]
Konrad Herrmann,et al.
A laser measurement system for the high-precision calibration of displacement transducers
,
1996
.
[7]
G. Sommargren.
A new laser measurement system for precision metrology
,
1987
.