Amorphous silicon technology

The growth methods discussed in this volume include both regular and remote plasma enhanced chemical vapor deposition (PECVD), catalytic CVD (CTLCVD), atmospheric pressure CVD (APCVD), very high frequency plasma CVD (VHCVD) and magnetron sputtering. Some of the papers discuss the use of disilane to increase growth rates. The general questions of the kinetics of film growth is an important topic of discussion in this volume. Several mechanisms for monitoring film growth and lasma diagnostics are also topics of discussion.