Capacity Planning Method for Semiconductor Fab with Time Constraints between Operations

It is difficult to plan capacities of a semiconductor wafer fabrication with constraints of queue time which means a waiting time from the end of a step to the start of the next step for warranting production quality. If the queue time constraints could not be kept, the product is scrapped or reprocessed for qualitative recovery, and production efficiency remarkably decreases. This paper proposes an evaluation method which enables capacity planning of a fab with the queue time constraints, and shows its validity by simulation experiments. Furthermore we present an effectiveness of the method by applying to actual production lines

[1]  T. Fukuda,et al.  Artificial immunity based management system for a semiconductor production line , 1997, 1997 IEEE International Conference on Systems, Man, and Cybernetics. Computational Cybernetics and Simulation.

[2]  John A. White,et al.  Analysis of queueing systems , 1975 .

[3]  Jennifer K. Robinson,et al.  Capacity planning for semiconductor wafer fabrication with time constraints between operations , 1999, WSC '99.

[4]  Dong-Jun Kim,et al.  A Simple Optical Angular Sensors to Measure the Human Joint Angle , 2006, 2006 SICE-ICASE International Joint Conference.

[5]  T. Narikiyo,et al.  Realization of Automatic Parking Task Based on Hybrid Affine System Modeling , 2006, 2006 SICE-ICASE International Joint Conference.