Linear energy control of laser drilling and its application for TFT-LCD bright pixel repairing

Laser drilling is energy dependent and linear proportion to the thickness of the materials. Therefore, a linear laser power supplier will be convenient applying in extensive aperture processes. However, practically, the energy output of laser equipments is non-linear. To obtain a linear energy output, laser power meter is utilized for energy compensation, but the application of laser power meter requires ceasing the operation of laser equipment. In this paper, a linear energy compensation method was investigated and designed by using a measurement of laser energy output that provides a stable linear energy laser for processes. In the method, the laser energy testing only requires a fixed time for measuring laser energy and changing laser energy compensate table. Furthermore, the laser equipment doses not need stop during the laser power meter calibration. In addition, a software method for linear energy compensation was designed and applied to the laser equipments which have no laser power meter compensation practices. The method could control and compensate laser energy in linear output which the energy linear proportion (R square) reaches 0.9989 and provided a very stable power source. When using this laser method in the LCD panel design processes, the successes rate reached 80% in performing the bright pixel repair. In panel defect repair, it could prevent taking the case apart from module and fabricate that increases the efficiency in production.