A compact evanescently-coupled germanium PIN waveguide photodetector

A compact 1.6×10μm2 germanium pin waveguide photodetector was demonstrated on a Silicon-on-Insulator substrate. The dark current of the photodetector was measured to be 0.66μA at -1V bias voltage, which is much lower than recently reported. The photodetector exhibited a 3-dB bandwidth of 20GHz at the wavelength of 1.55μm. A clear open eye diagram at 10Gb/s was also obtained.

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