Calibration of the photoluminescence technique for measuring B, P and Al concentrations in Si in the range 1012 to 1015 cm-3 using Fourier transform spectroscopy

Calibrations are reported for measuring boron, phosphorus and aluminium concentrations in silicon by comparing the intensities of bound-exciton and free-exciton luminescence features. Particular attention has been directed towards investigating the effects of excitation density and instrumental resolution. The luminescence spectra have been corrected for the system response so that the calibrations are independent of the equipment used and are hence transferable. Fourier transform rather than dispersive spectroscopy has been employed to measure the luminescence spectra. Since Fourier transform photoluminescence spectroscopy is a relatively new technique, it is described in some detail.

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